Doping effects in AlGaAs
- 1 May 1985
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 3 (3) , 820-822
- https://doi.org/10.1116/1.583110
Abstract
A summary of the results of a few experiments on a variety of structures based on GaAs–AlGaAs heterojunctions, in which the AlGaAs was Si doped are reported. RHEED and SIMS results are presented for heavily and moderately doped AlGaAs, showing that Si segregated toward the growing front. Photoluminescence spectra of heavily doped AlGaAs has a dominant low energy peak and is absent of the exciton peak. Normal and inverted selectively doped structures were grown at a variety of conditions. Their properties demonstrate that Si segregates toward the growing front, and suggests that this effect could be the main cause of the low mobility in inverted structures.Keywords
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