dc magnetron- and diode-sputtered polycrystalline Fe and amorphous Tb(FeCo) films: Morphology and magnetic properties
- 15 January 1986
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 59 (2) , 551-556
- https://doi.org/10.1063/1.336667
Abstract
We have prepared polycrystalline Fe and amorphous Tb(FeCo) films using both dc diode‐ and magnetron‐sputtering techniques. Magnetic properties and aging characteristics of these films were measured by a vibrating sample magnetometer and an automatic torque magnetometer. Film morphologies were studied by transmission electron microscopy. The magnetic and aging characteristics are closely correlated to the film morphology. It was also found that different sputtering methods can be tailored to produce a similar film morphology. Among the sputtering parameters, the Ar pressure during deposition at room or lower temperature strongly influences the film morphology.This publication has 8 references indexed in Scilit:
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