Microdac — A novel approach to measure in situ deformation fields of microscopic scale
- 1 November 1996
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 36 (11-12) , 1939-1942
- https://doi.org/10.1016/0026-2714(96)00233-8
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Experimental and numerical investigations of thermo-mechanically stressed micro-componentsMicrosystem Technologies, 1994