Unbalanced dc magnetrons as sources of high ion fluxes

• 1 May 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (3) , 453-456
• https://doi.org/10.1116/1.573904

Abstract

Keywords

• ION FLUXES
• HIGH ION
• UNBALANCED DC MAGNETRONS