Metal-less x-ray phase-shift masks for nanolithography

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 3141-3144
• https://doi.org/10.1116/1.585944

Abstract

Keywords

• NANOLITHOGRAPHY
• METAL
• PHASE SHIFT MASKS
• X RAY PHASE