ID-Diamond-Sawing Damage to Germanium and Silicon

• 1 January 1969
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 116  (6) , 893
• https://doi.org/10.1149/1.2412121

Abstract

Keywords

• GERMANIUM AND SILICON
• DIAMOND SAWING DAMAGE
• DAMAGE TO GERMANIUM