Hochreines Monosilan für die Elektronikindustrie – Synthese, Reinigung und Charakterisierung
- 1 November 1988
- journal article
- research article
- Published by Wiley in Chemie Ingenieur Technik - CIT
- Vol. 60 (11) , 815-821
- https://doi.org/10.1002/cite.330601103
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Amorphe und polykristalline HalbleiterPublished by Springer Nature ,1984
- Halbleiter-TechnologiePublished by Springer Nature ,1984
- The effect of annealing on the properties of silicidized molybdenum thin filmsJournal of Applied Physics, 1981