A Bakeable Thermistor Vacuum Gauge
- 1 November 1964
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 1 (2) , 62-64
- https://doi.org/10.1116/1.1491725
Abstract
A thermistor detector for measuring pressures in the range 10−4 to 1 Torr is described. This gauge operates at constant temperature (∼ 100 °C), has a small volume, and presents an innocuous surface to the vacuum system. This gauge is very stable, maintains its calibrations after a 450 °C bakeout, and is suited for use in ultrahigh-vacuum systems. Operating characteristics are described.Keywords
This publication has 0 references indexed in Scilit: