Application of the simulator “XMAS” on specific problems in sub-half-micron lithography
- 1 December 1985
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 3 (1-4) , 387-394
- https://doi.org/10.1016/0167-9317(85)90049-8
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: