In search of low-dislocation-density hetero-epitaxial structures
- 1 April 1989
- journal article
- semiconductor processing
- Published by Springer Nature in JOM
- Vol. 41 (4) , 20-24
- https://doi.org/10.1007/bf03220193
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The effect of substrate growth area on misfit and threading dislocation densities in mismatched heterostructuresJournal of Vacuum Science & Technology B, 1989
- Models of Thin Film Growth ModesJOM, 1987