Microfluidic operations using deformable polymer membranes fabricated by single layer soft lithography

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Abstract
We show that it is possible to use single layer soft lithography to create deformable polymer membranes within microfluidic chips for performing a variety of microfluidic operations. Single layer microfluidic chips were designed, fabricated, and characterized to demonstrate pumping, sorting, and mixing. Flow rates as high as 0.39 µl min−1 were obtained by peristaltic pumping using pneumatically-actuated membrane devices. Sorting was attained via pneumatic actuation of membrane units placed alongside the branch channels. An active mixer was also demonstrated using single-layer deformable membrane units.