A Non-Contacting Length Comparator with 10 Nanometer Precision
- 1 June 1973
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 12 (3) , 120395-120395-
- https://doi.org/10.1117/12.7971639
Abstract
A non-contacting length comparator utilizing two specially designed photo-electric micro-scopes has been constructed. Performance tests of this comparator, using lapped and polished steel surfaces demonstrate a resolution of -1 nanometer, a precision of--10 nanometers, and a linear range in excess of 50 micrometers.Keywords
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