Characterization of a 3 cm Kaufman ion source with nitrogen feed gas
- 1 November 1986
- Vol. 36 (11-12) , 841-845
- https://doi.org/10.1016/0042-207x(86)90123-5
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- The nitrogen ion laser pumped by charge transferIEEE Journal of Quantum Electronics, 1984
- Quantitative ion beam process for the deposition of compound thin filmsApplied Physics Letters, 1983