Frequency trimming for high-frequency SAW device using ultraviolet light
- 24 May 1984
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 20 (11) , 433-434
- https://doi.org/10.1049/el:19840300
Abstract
A new technique for frequency trimming of surface-acoustic-wave (SAW) devices is demonstrated using ultraviolet light. Irradiation by ultraviolet light of a very thin SiO2 film which is fabricated on a quartz substrate makes it possible to adjust the operation frequency within an accuracy of better than ±10 kHz at 900 MHz with an insertion loss increase of less than 1 dB. This technique is applied successfully to a 668 MHz SAW resonator.Keywords
This publication has 3 references indexed in Scilit:
- Precision Surface Acoustic Wave (SAW) OscillatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1982
- GHz SAW ResonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1979
- Fine Tuning of Narrow-Band SAW Devices Using Dielectric OverlaysPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1977