Micropatterning of high T c films with an excimer laser
- 11 April 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (15) , 1271-1273
- https://doi.org/10.1063/1.99678
Abstract
Micron‐wide lines of high Tc Y‐Ba‐Cu‐O have been successfully patterned by ablating the films with a pulsed excimer laser. The high Tc films are mounted onto a computer‐controlled stepping stage and irradiated with a demagnified image of a variable‐size rectangular aperture. This technique has been used for fabricating features ranging from several centimeters in length to submicron in width without any degradation in Tc. For example, a superconducting microstructure of Y‐Ba‐Cu‐O, nominally 1 μm wide and 2.5 μm long, with a Tc (R=0) of 88 K and a Jc of 5×104 A/cm2 at 4.2 K was fabricated.Keywords
This publication has 7 references indexed in Scilit:
- Magnetron sputtering and laser patterning of high transition temperature Cu oxide filmsApplied Physics Letters, 1987
- Reproducible technique for fabrication of thin films of high transition temperature superconductorsApplied Physics Letters, 1987
- Measurement of anisotropic resistivity and Hall constant for single-crystalPhysical Review Letters, 1987
- Pulsed laser etching of high T c superconducting filmsApplied Physics Letters, 1987
- Quantum interference devices made from superconducting oxide thin filmsApplied Physics Letters, 1987
- Effects of radiation damage in ion-implanted thin films of metal-oxide superconductorsApplied Physics Letters, 1987
- Thermodynamic fluctuations in the superconductor : Evidence for three-dimensional superconductivityPhysical Review B, 1987