Micro thermoelectric cooler fabrication: growth and characterization of patterned Sb/sub 2/Te/sub 3/ and Bi/sub 2/Te/sub 3/ films
- 6 May 2004
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 665-668
- https://doi.org/10.1109/ict.2003.1287600
Abstract
A column-type micro thermoelectric cooler is being fabricated using p-type Sb/sub 2/Te/sub 3/ and n-type Bi/sub 2/Te/sub 3/ films (approximately 4 /spl mu/m thick). The films are grown by thermal co-evaporation and patterned on Cr/Au/Ti/Pt (hot) connectors, which are deposited onto a silicon dioxide coated wafer. The column height is limited by control of the Te deposition rate. Although a high substrate temperature during thermoelectric film deposition is desired, it has been limited by the degradation of the photoresist used for patterning. The measured Seebeck coefficient and electrical resistivity of the thermoelectric films are reported, and preliminary results show that excess tellurium increases the Seebeck coefficient.Keywords
This publication has 3 references indexed in Scilit:
- Peltier effect in a co-evaporated Sb2Te3(P)-Bi2Te3(N) thin film thermocoupleThin Solid Films, 2002
- Structural and thermoelectric transport properties of Sb2Te3 thin films grown by molecular beam epitaxyJournal of Applied Physics, 2002
- Cooling performance of integrated thermoelectric microcoolerSolid-State Electronics, 1999