A review of recent advances in solid film lubrication

• 1 March 1987
• journal article
• review article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 5  (2) , 212-219
• https://doi.org/10.1116/1.574106

Abstract

Keywords

• STRUCTURAL
• LUBRICATING FILMS
• SPUTTERED
• ION PLATED
• MOS2 AND ION