Liquid Phase Epitaxy Apparatus for Multiple Layers Utilizing Centrifugal Forces

• 1 January 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (S1) , 457
• https://doi.org/10.7567/jjaps.16s1.457

Abstract

Keywords

• LIQUID PHASE
• MULTIPLE LAYERS
• PHASE EPITAXY
• EPITAXY APPARATUS
• UTILIZING CENTRIFUGAL
• LAYERS UTILIZING
• CENTRIFUGAL FORCES