Surface Resistance Imaging with a Scanning Near-Field Microwave Microscope

Preprint

12 December 1997

preprint
Published by arXiv in arXiv

https://doi.org/10.48550/arXiv.cond-mat/9712142

Abstract

We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant frequency, allowing measurements with a sensitivity to frequency shifts as small as one parts in 50000 for a 30 ms sampling time. The frequency shifts can be converted to sheet resistance based on a simple model of the system.

Keywords

MICROWAVE MICROSCOPE
RESISTANCE IMAGING
SURFACE RESISTANCE
FREQUENCY SHIFTS
SHEET RESISTANCE
FIELD MICROWAVE
SCANNING

All Related Versions

Version 1, 1997-12-12, ArXiv
Published version: Applied Physics Letters, 71 (12), 1736.

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