BN films obtained by ionized deposition.

• 1 January 1986
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 29  (5) , 404-406
• https://doi.org/10.3131/jvsj.29.404

Abstract

Keywords

• IONIZED DEPOSITION
• BN FILMS OBTAINED
• OBTAINED BY IONIZED