Microfabrication of Ceramics by Filling of Photoresist Molds

• 13 September 2000
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 12  (17) , 1261-1263
• https://doi.org/10.1002/1521-4095(200009)12:17<1261::aid-adma1261>3.0.co;2-4

Abstract

Keywords

• LOST SILICON MOLDS
• MICROPATTERNING
• NANOLITHOGRAPHY
• PHOTOLITHOGRAPHY
• SILICONE MASKS