Infrared diode laser absorption spectroscopy measurements of CFX (X=1–3) radical densities in electron cyclotron resonance plasmas employing C4F8, C2F6, CF4, and CHF3 gases
- 1 July 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 14 (4) , 2343-2350
- https://doi.org/10.1116/1.580020
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: