Reactive sputtering using two reactive gases, experiments and computer modeling

• 1 July 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 11  (4) , 1534-1539
• https://doi.org/10.1116/1.578501

Abstract

Keywords

• COMPUTER MODELING
• TWO REACTIVE
• REACTIVE GASES
• REACTIVE SPUTTERING USING