A high sensitivity z-axis torsional silicon accelerometer
- 24 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Vertical comb array microactuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A bulk silicon dissolved wafer process for microelectromechanical devicesJournal of Microelectromechanical Systems, 1992
- A micromechanical capacitive accelerometer with a two-point inertial-mass suspensionSensors and Actuators, 1983