Suppression of Arsenic Autodoping with Rapid Thermal Epitaxy for Low Power Bipolar Complementary Metal Oxide Semiconductor
- 1 July 1995
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 142 (7) , 2430-2434
- https://doi.org/10.1149/1.2044315
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: