Micromachining of metal surfaces by scanning probe microscope

• 1 May 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (3) , 1876-1880
• https://doi.org/10.1116/1.587660

Abstract

Keywords

• SCANNING PROBE MICROSCOPE