Electron beam resists produced from monomer-polymer Langmuir-Blodgett films
- 1 January 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 99 (1-3) , 305-315
- https://doi.org/10.1016/0040-6090(83)90397-8
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- PMMA copolymers as high sensitivity electron resistsJournal of Vacuum Science and Technology, 1979
- On the use of filter paper wilhelmy plates with insoluble monolayersJournal of Colloid and Interface Science, 1977