2.5 kHz high repetition rate XeCl excimer laser

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Abstract
An XeCl excimer laser was operated at the high repetition rate of 2.5 kHz, which can circulate the laser gas uniformly and efficiently. The characteristics of the gas flow rate and the average laser power versus the repetition rate were investigated in both He and Ne buffer gas mixtures. In He buffer gas, the average laser power saturates at 1.3 kHz and, thereafter, drops abruptly. On the other hand, stable operation at the highest repetition rate, 2.5 kHz, has been attained in Ne buffer at a gas flow rate of 54 m/s with an average laser power of 87 W.

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