Ultra-small metal particle arrays produced by high resolution electron-beam lithography
- 1 November 1982
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 53 (11) , 7186-7188
- https://doi.org/10.1063/1.331614
Abstract
Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.This publication has 1 reference indexed in Scilit:
- Electron-beam fabrication of 80-Å metal structuresApplied Physics Letters, 1976