Fabrication of Diffractive Optical Elements for X-ray Diagnostics
- 1 January 1981
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 75 (1) , 223-224
- https://doi.org/10.1063/1.33155
Abstract
A paper was presented which reviewed the techniques of microlithography, etching, deposition and plating that are used to fabricate diffractive optical elements for the soft x‐ray region. Here a brief summary and a guide to some of the recent literature, which contains details of fabrication and applications, are provided.Keywords
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