Sputtering of Thin Films in an Ion Microprobe
- 1 January 1976
- book chapter
- Published by Springer Nature
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Investigation of surface reactions by the static method of secondary ion mass spectrometry: V. The oxidation of titanium, nickel, and copper in the monolayer rangeSurface Science, 1974
- Sputtering of Niobium by Niobium, Hydrogen, Deuterium, and Helium Ions in the 10- to 80-keV Energy RangeJournal of Applied Physics, 1971
- Design of a combined ion and electron microprobe apparatusInternational Journal of Mass Spectrometry and Ion Physics, 1971