Cross-sectional scanning tunneling and scanning force microscopy of amorphous hydrogenated silicon pn-doping superlattices in nitrogen and in air
- 1 July 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (4) , 2440-2442
- https://doi.org/10.1116/1.587779
Abstract
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