Preparation of Y-Ba-Cu-O thin films on MgO by dc magnetron sputtering from a stoichiometric Y1Ba2Cu3O7−δ target
- 12 October 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (15) , 1194-1196
- https://doi.org/10.1063/1.98730
Abstract
Y‐Ba‐Cu‐O thin films have been deposited on MgO substrates by dc magnetron sputtering from a stoichiometric YBa2Cu3O7−δ target, after which they are subjected to a short heat treatment. Zero resistance is routinely achieved near 60 K, and one film shows zero resistance at 68.0 K.Keywords
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