Improved process of fabricating AC-coupled silicon micro-strip sensors
- 1 December 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 351 (2-3) , 463-465
- https://doi.org/10.1016/0168-9002(94)91375-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ion-implanted silicon detectors processed on a 100 mm waferNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1991
- Present and future developments of Si detectors at MBBNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1990
- Recent development of detectors with integrated capacitors and polysilicon resistorsIEEE Transactions on Nuclear Science, 1988
- A Si strip detector with integrated coupling capacitorsNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1987