Fracture Strength of Polycrystalline Silicon
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Fracture strain of LPCVD polysiliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin filmsJournal of Microelectromechanical Systems, 1998
- New test structures and techniques for measurement of mechanical properties of MEMS materialsPublished by SPIE-Intl Soc Optical Eng ,1996