Langmuir Probe Measurements and Characterization of Silicon Etching in SF 6 / O 2 Discharges
- 1 March 1992
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 139 (3) , 839-844
- https://doi.org/10.1149/1.2069313
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: