Fabrication of SAW Resonators for Improved Long Term Aging

• 1 January 1978
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 573-579
• https://doi.org/10.1109/ultsym.1978.197105

Abstract

Keywords

• FABRICATION
• SURFACE ACOUSTIC WAVES
• AGING
• ALUMINUM
• BAND PASS FILTERS
• MICROWAVE FILTERS
• RESONATOR FILTERS
• ACOUSTIC WAVES
• ACOUSTIC TESTING
• ETCHING