Ion beam system for implanting industrial products of various shapes
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 88-93
- https://doi.org/10.1016/0168-583x(85)90614-7
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- The commercial development of ion implantation for steel and carbide toolsThin Solid Films, 1981