High-voltage silicon thin film transistor on quartz

• 1 June 1982
• journal article
• Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
• Vol. 3  (6) , 167-168
• https://doi.org/10.1109/edl.1982.25524

Abstract

Keywords

• THIN FILM TRANSISTORS
• OPTICAL DEVICE FABRICATION
• ANNEALING
• LIQUID CRYSTAL DISPLAYS
• AMORPHOUS SILICON
• SUBSTRATES
• FLAT PANEL DISPLAYS
• SEMICONDUCTOR MATERIALS
• GRAIN SIZE
• POWER LASERS