A novel methodology for the manufacturability of robust CMOS semiconductor gas sensor arrays
- 13 June 2001
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 77 (1-2) , 395-400
- https://doi.org/10.1016/s0925-4005(01)00701-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbonsSensors and Actuators B: Chemical, 1997
- Integrated ultra-thin-film gas sensorsSensors and Actuators B: Chemical, 1994
- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993
- An integrated low-power thin-film CO gas sensor on siliconSensors and Actuators, 1988