Incorporation of rare gases in sputtered amorphous metal films

• 1 January 1977
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 14  (1) , 152-157
• https://doi.org/10.1116/1.569109

Abstract

Keywords

• SPUTTERED AMORPHOUS
• RARE GASES
• AMORPHOUS METAL
• METAL FILMS
• INCORPORATION OF RARE