Improvement of detector fabrication by the planar process
- 1 September 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 226 (1) , 89-93
- https://doi.org/10.1016/0168-9002(84)90173-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Low energy range distributions of 10B and 11B in amorphous and crystalline siliconNuclear Instruments and Methods in Physics Research, 1982
- Study of ion implanted Si pn-junction detectors with heavy ionsNuclear Instruments and Methods in Physics Research, 1982
- Determination of the energy straggling of Am-α particles in aluminum foilsNuclear Instruments and Methods, 1980
- Fabrication of low noise silicon radiation detectors by the planar processNuclear Instruments and Methods, 1980