High-Q photonic crystal microcavities fabricated in a thin GaAs membrane
- 1 November 2001
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 19 (6) , 2749-2752
- https://doi.org/10.1116/1.1412893
Abstract
We report on the fabrication of photonic crystal microcavities in GaAs having H1 and H2 defects for lattice constants as small as 255 nm. In H2 microcavities, we observed resonances with Q factors as high as 4000. The degeneracy of these high-Q modes is lifted by the imperfect nature of the fabrication process.Keywords
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