A goniometer head for an atom-probe field ion microscope
- 1 July 1981
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 14 (7) , 800-802
- https://doi.org/10.1088/0022-3735/14/7/004
Abstract
With the goniometer head described, an area of about 0.1 nm2 on the surface of a metallic sample can be selected and analysed by means of a time-of-flight mass spectrometer. The coaxial geometry of the heat allows a voltage pulse to be transmitted with a rise time of 1 ns to the sample which can be cooled to about 20K in a vacuum better than 0.13 mu Pa (10-9 Torr). With a master clock of 200 MHz these features result in a mass accuracy of 1 part in 300.Keywords
This publication has 4 references indexed in Scilit:
- A magnetic sector atom-probe FIMJournal of Vacuum Science and Technology, 1974
- The 10 cm Atom ProbeReview of Scientific Instruments, 1973
- Surface microscopy and analysis with the atom-probe field-ion microscopeVacuum, 1972
- Construction and performance of an FIM-Atom ProbeSurface Science, 1970