Effect of Cu on Al-Transition Metal Reaction Kinetics
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Diffusion barriers in thin filmsThin Solid Films, 1978
- Intermetallic compounds of Al and transitions metals: Effect of electromigration in 1–2-μm-wide linesJournal of Applied Physics, 1978
- Anomalous growth of HfAl3 in thin filmsJournal of Vacuum Science and Technology, 1977
- Kinetics of compound formation in thin film couples of Al and transition metalsJournal of Vacuum Science and Technology, 1976
- Characteristics of aluminum-titanium electrical contacts on siliconApplied Physics Letters, 1973