The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport
- 31 July 1968
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 11 (7) , 683-684
- https://doi.org/10.1016/0038-1101(68)90071-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Hydrogen Plasma Transport of Se, As, and TeJournal of the Electrochemical Society, 1966
- Kathodenzerst ubungThe European Physical Journal A, 1926