All-optical pressure sensor with temperature compensation on resonant PECVD silicon nitride microstructures
- 13 February 1992
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 28 (4) , 400-402
- https://doi.org/10.1049/el:19920251
Abstract
A novel sensor is presented incorporating easy separation of pressure and temperature sensitivity, both of which affect the frequency of a resonating bridge. With PECVD silicon nitride as bridge material, pressure sensitivities up to 86% per bar were achieved.Keywords
This publication has 1 reference indexed in Scilit:
- Fiber optically addressed silicon-microresonator pressure sensorPublished by SPIE-Intl Soc Optical Eng ,1990