High Resolution Freeze Replica by Means of High Melting Point Metal Shadowing

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Abstract
A high resolution freeze-fractured surface replica method by means of high melting point and high latent heat metal shadowing was evaluated. The metal layers of 3 nm or less thickness, evaporated by W, Ta and Mo, consisted of very fine grains with no migration by the electron irradiation. Although the electron image contrast of the replica was markedly reduced as compared with that shadowed by Pt, the grains in the replica membrane were fine enough to obtain higher resolution pictures at high magnifications. The ion beam sputtering method for high melting point metal deposition is also discussed.

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