Lithographic tolerances based on vector diffraction theory

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2997-3003
• https://doi.org/10.1116/1.585959

Abstract

Keywords

• DIFFRACTION THEORY
• VECTOR DIFFRACTION
• LITHOGRAPHIC TOLERANCES BASED