Mass spectrometric diagnosis of the surface nitriding mechanism in a d.c. glow discharge
- 1 June 1984
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 4 (2) , 89-105
- https://doi.org/10.1007/bf00647190
Abstract
No abstract availableKeywords
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- Die Nitridschichtbildung bei der GlimmnitrierungPublished by Springer Nature ,1965
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